What Is Fused Glass?
Fused glass is glass that has been heated in a kiln until the pieces melt and bond together. It is widely known for its durability, optical clarity, and low thermal expansion, making it an essential material in semiconductor fabrication.
Applications in Semiconductor Fabrication
- Photomasks: Used as the base material for precise patterning in photolithography systems.
- Substrates: Fused silica provides a smooth, durable surface for thin-film deposition and microelectronics.
- Wafer Inspection and Metrology: Optical components made of fused glass enable high-precision imaging and defect detection.
- Protective Encapsulation: Fused glass encapsulates semiconductor components to shield them from environmental factors.
- Optical Components: Used in lenses and filters for lasers in semiconductor processing.
- Vacuum Chambers: High-purity fused silica windows support extreme conditions in semiconductor manufacturing.
Why Use Fused Glass?
- Thermal Stability: Handles high temperatures without cracking or warping.
- Optical Clarity: High transparency ensures precise light transmission.
- Durability: Resistant to scratches, wear, and chemical reactions.
- Low Thermal Expansion: Ensures dimensional stability under varying temperatures.